Self-assembled 3-D silicon microscanners with self-assembled electrostatic drives
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Photonics Technology Letters
سال: 2000
ISSN: 1041-1135,1941-0174
DOI: 10.1109/68.887729